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 Sputtering depositon system / nanocluster deposition source

Thin film deposition system with two planar magnetrons and 2D sample rotation. A nanocluster deposition source is attached to this depositon system and the NPs can be ejected into the main chamber with a simultaneous magnetron sputtering deposition.

Centre of Physics/ Department of Physics
Laboratory 0.14, Azurém
Luis Rebouta  rebouta@fisica.uminho.pt